Integrated Silicon Pressure Sensor
Description
MOTOROLA
SEMICONDUCTOR TECHNICAL DATA
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Integrated Silicon Pressure Sensor On-Chip Signal Conditioned, Temperature Compensated and Calibrated
The MPXL5010 low profile series piezoresistive transducer is a state–of–the–art monolithic silicon pressure sensor designed for a wide range of applications, but particularly those employing a microcontroller or microprocessor with A/D inputs.
This patented, single element transducer combines advanced micromachining techniques, thin–film metallization, and bipolar processing to provide an accurate, high level analog output signal that is proportional to the applied pressure.
Features • Low Profile Package • 5.
0% Maximum Error over 0° to 85°C • Ideally Suited for Microprocessor or Microcontroller–Based Systems • Patented Silicon Shear Stress Strain Gauge • Available in Differential and Gauge Configurations • Also Available in Unibody Package (see MPX5010 Data Sheet)
Application Examples • Hospital Beds • HVAC • Respiratory Systems • Process Control
VS
2
MPXL5010 SERIES
OPERATING OVERVIEW INTEGRATED
PRESSURE SENSOR 0 to 10 kPa (0 to 1.
45 psi)
0.
2 to 4.
7 Volts Output
CASE 469–01, STYLE 1
CASE 472B–01, STYLE 1
X–ducer SENSING ELEMENT
THIN FILM TEMPERATURE COMPENSATION
AND GAIN STAGE #1
GAIN STAGE #2 AND
GROUND REFERENCE SHIFT CIRCUITRY
4 Vout
3 PINS 1 AND 5 THROUGH 8 ARE NO CONNECTS
CASE 472–01, STYLE 1
GND
Figure 1.
Fully Integrated Pressure Sensor Schematic
MAXIMUM RATINGS(1)
Parametrics
Symbol
Value
Unit
Overpressure(2) (P1 > P2) Burst Pressure(2) (P1 > P2)
Pmax Pburst
75 kPa 100 kPa
Storage Temperature
Tstg
– 40° to +125°
°C
Operating Temperature
TA
– 40° to +125°
°C
1.
TC = 25°C unless otherwise noted.
2.
Exposure beyond the specified limits may cause permanent damage or degradation to the device.
PIN NUMBER
1 N/C 5
2 VS
6
3 Ground 7
4 Vout
8
N/C N/C N/C N/C
NOTE: Pins 1, 5, 6, 7 and 8 are internal device connections.
Do not connect to external circuitry...
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