MEMS Airflow Sensor
MEMS Airflow Sensor
D6F-10A, -20A, -50A
Compact, intelligent sensor featuring MEMS technology for precision mass airflo...
Description
MEMS Airflow Sensor
D6F-10A, -20A, -50A
Compact, intelligent sensor featuring MEMS technology for precision mass airflow measurement
Precision mass airflow up to 50 slpm Stable output across full scale Horizontal mounting feature with *NBR ‘O’ ring option Compact size 78 (L) x 30 (W) x 30 (H) mm Low power consumption
* NBR material recommended for all applications including medical and food processing
Application Examples
Industrial processes Medical Respirators and Ventilators MiG and TiG welding systems Anesthesia Delivery Mass flow controllers Scientific / test equipment Fuel cell controls
Ordering Information
Model D6F-10A5 D6F-20A5 D6F-50A5 D6F-10A6 D6F-20A6 D6F-50A6 D6F-Cable1
Case Thermoplastic resin / Aluminum alloy Thermoplastic resin / Aluminum alloy Thermoplastic resin / Aluminum alloy Thermoplastic resin / Aluminum alloy Thermoplastic resin / Aluminum alloy Thermoplastic resin / Aluminum alloy
Applicable Gas Air, N2O, O2 Air, N2O, O2 Air, N2O, O2 Air, N2O, O2 Air, N2O, O2 Air, N2O, O2
■ Rating
Absolute maximum rating
Item Power-supply voltage Output voltage
VCC VOUT
Term
26.4 6
Flow Range 0 – 10 LPM 0 – 20 LPM 0 – 50 LPM 0 – 10 LPM 0 – 20 LPM 0 – 50 LPM
Ratings
Notes Built-in orifice, Right-angle Connect Built-in orifice, Right-angle Connect Built-in orifice, Right-angle Connect Built-in orifice, Straight Connect Built-in orifice, Straight Connect Built-in orifice, Straight Connect Optional (recommended)
VDC VDC
Unit
MEMS Airf...
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