MEMS Mass Flow Sensor
MEMS Mass Flow Sensor
D6F-03A3-000
Compact, sensors featuring MEMS technology for precision mass airflow measurement
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Description
MEMS Mass Flow Sensor
D6F-03A3-000
Compact, sensors featuring MEMS technology for precision mass airflow measurement
Precision unidirectional mass airflow up to 3 LPM Stable output across full scale Ultra-compact size 36.6 (L) x 8 (W) x 16.8 (H) mm Low power consumption
Application Examples
Pick and place systems Industrial processes Leak detection Spectroscopy Mass flow controllers Scientific / test equipment Environmental comfort controls Fuel cell controls
Ordering Information
Model D6F-03A3-000 D6F-Cable2
Case Thermoplastic resin / Aluminum alloy
*Dry gas must not contain large particles, e.g., dust, oil, mist.
■ Rating
Absolute maximum rating
Item Power-supply voltage Output voltage
VCC VOUT
Term
Applicable Gas Air*
Flow Range 0 – 3 LPM
Ratings 26.4 6
VDC VDC
Unit
MEMS Mass Flow Sensor D6F-03A3-000
1
■ Electrical Performance
Recommended operation condition and DC characteristic
Item Power-supply voltage Operating temperature Maximum output voltage Minimum output voltage
VCC TOPR VOH VOL
Term
Condition — — Load resistance 10kΩ Load resistance 10kΩ
MIN 10.8 0 5 0
TYP — — — —
MAX 26.4 50 5.7 1
Unit VDC °C VDC VDC
■ Basic Performance
0 to 3L/min. (Normal) volumetric flow rate at 0° C, 101.3kPa. Measurement condition: Power-supply voltage 12 ±0.1VDC, ambient temperature 25 ±5° C and ambient air humidity 25 to 75% RH.
D6F-03A3-000
Flow Rate L/min (normal) Output Voltage (VDC)
0 1.00 ±0.2
0.6 2.83 ±0.2
1.2 3.77 ±0.2
1.8 4....
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