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MPXL5010G7U Dataheets PDF



Part Number MPXL5010G7U
Manufacturers Motorola
Logo Motorola
Description Integrated Silicon Pressure Sensor
Datasheet MPXL5010G7U DatasheetMPXL5010G7U Datasheet (PDF)

MOTOROLA SEMICONDUCTOR TECHNICAL DATA Order this document by MPXL5010/D Integrated Silicon Pressure Sensor On-Chip Signal Conditioned, Temperature Compensated and Calibrated The MPXL5010 low profile series piezoresistive transducer is a state–of–the–art monolithic silicon pressure sensor designed for a wide range of applications, but particularly those employing a microcontroller or microprocessor with A/D inputs. This patented, single element transducer combines advanced micromachining techn.

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MOTOROLA SEMICONDUCTOR TECHNICAL DATA Order this document by MPXL5010/D Integrated Silicon Pressure Sensor On-Chip Signal Conditioned, Temperature Compensated and Calibrated The MPXL5010 low profile series piezoresistive transducer is a state–of–the–art monolithic silicon pressure sensor designed for a wide range of applications, but particularly those employing a microcontroller or microprocessor with A/D inputs. This patented, single element transducer combines advanced micromachining techniques, thin–film metallization, and bipolar processing to provide an accurate, high level analog output signal that is proportional to the applied pressure. Features • Low Profile Package • 5.0% Maximum Error over 0° to 85°C • Ideally Suited for Microprocessor or Microcontroller–Based Systems • Patented Silicon Shear Stress Strain Gauge • Available in Differential and Gauge Configurations • Also Available in Unibody Package (see MPX5010 Data Sheet) Application Examples • Hospital Beds • HVAC • Respiratory Systems • Process Control VS 2 MPXL5010 SERIES OPERATING OVERVIEW INTEGRATED PRESSURE SENSOR 0 to 10 kPa (0 to 1.45 psi) 0.2 to 4.7 Volts Output CASE 469–01, STYLE 1 CASE 472B–01, STYLE 1 X–ducer SENSING ELEMENT THIN FILM TEMPERATURE COMPENSATION AND GAIN STAGE #1 GAIN STAGE #2 AND GROUND REFERENCE SHIFT CIRCUITRY 4 Vout 3 PINS 1 AND 5 THROUGH 8 ARE NO CONNECTS CASE 472–01, STYLE 1 GND Figure 1. Fully Integrated Pressure Sensor Schematic MAXIMUM RATINGS(1) Parametrics Symbol Value Unit Overpressure(2) (P1 > P2) Burst Pressure(2) (P1 > P2) Pmax Pburst 75 kPa 100 kPa Storage Temperature Tstg – 40° to +125° °C Operating Temperature TA – 40° to +125° °C 1. TC = 25°C unless otherwise noted. 2. Exposure beyond the specified limits may cause permanent damage or degradation to the device. PIN NUMBER 1 N/C 5 2 VS 6 3 Ground 7 4 Vout 8 N/C N/C N/C N/C NOTE: Pins 1, 5, 6, 7 and 8 are internal device connections. Do not connect to external circuitry or ground. Senseon and X–ducer are trademarks of Motorola, Inc. REV 2 © MMotootroolrao, lIanc.S1e9n97sor Device Data 1 MPXL5010 SERIES OPERATING CHARACTERISTICS (VS = 5.0 Vdc, TA = 25°C unless otherwise noted, P1 > P2) Characteristic Symbol Min Pressure Range(1) Supply Voltage(2) POP VS 0 4.75 Supply Current Minimum Pressure Offset(3) @ VS = 5.0 Volts Full Scale Output(4) @ VS = 5.0 Volts Full Scale Span(5) @ VS = 5.0 Volts Accuracy(6) (0 to 85°C) (0 to 85°C) (0 to 85°C) (0 to 85°C) Io Voff VFSO VFSS — — 0 4.475 — — Sensitivity V/P — Response Time(7) tR — Output Source Current at Full Scale Output Warm–Up Time(8) IO+ — —— Offset Stability(9) —— Decoupling circuit shown in Figure 3 required to meet Electrical Specifications. Typ — 5.0 7.0 0.2 4.7 4.5 — 450 1.0 0.1 20 ± 0.5 Max 10 5.25 10 0.425 4.925 — ± 5.0 — — — — — Unit kPa Vdc mAdc Vdc Vdc Vdc %VFSS mV/kPa ms mAdc mSec %VFSS MECHANICAL CHARACTERISTICS Characteristic Symbol Min Typ Max Unit Weight, Basic Element — — 1.5 — Grams NOTES: 1. 1.0 kPa (kiloPascal) equals 0.145 psi. 2. Device is ratiometric within this specified excitation range. 3. Offset (Voff) is defined as the output voltage at the minimum rated pressure. 4. Full Scale Output (VFSO) is defined as the output voltage at the maximum or full rated pressure. 5. Full Scale Span (VFSS) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the minimum rated pressure. 6. Accuracy (error budget) consists of the following: • Linearity: Output deviation from a straight line relationship with pressure over the specified pressure range. • Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is cycled to and from the minimum or maximum operating temperature points, with zero differential pressure applied. • Pressure Hysteresis: Output deviation at any pressure within the specified range, when this pressure is cycled to and from the minimum or maximum rated pressure, at 25°C. • TcSpan: Output deviation over the temperature range of 0° to 85°C, relative to 25°C. • TcOffset: Output deviation with minimum rated pressure applied, over the temperature range of 0° to 85°C, relative to 25°C. • Variation from Nominal: The variation from nominal values, for Offset or Full Scale Span, as a percent of VFSS, at 25°C. 7. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to a specified step change in pressure. 8. Warm–up is defined as the time required for the product to meet the specified output voltage after the Pressure has been stabilized. 9. Offset stability is the product’s output deviation when subjected to 1000 hours of Pulsed Pressure, Temperature Cycling with Bias Test. 2 Motorola Sensor Device Data MPXL5010 SERIES ON–CHIP TEMPERATURE COMPENSATION, CALIBRATION AND SIGNAL CONDITIONING .


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