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MOTOROLA
SEMICONDUCTOR TECHNICAL DATA
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Integrated Silicon Pressure Sensor On-Chip Signal Conditioned, Temperature Compensated and Calibrated
The MPXL5010 low profile series piezoresistive transducer is a state–of–the–art monolithic silicon pressure sensor designed for a wide range of applications, but particularly those employing a microcontroller or microprocessor with A/D inputs. This patented, single element transducer combines advanced micromachining techniques, thin–film metallization, and bipolar processing to provide an accurate, high level analog output signal that is proportional to the applied pressure.
Features • Low Profile Package • 5.0% Maximum Error over 0° to 85°C • Ideally Suited for Microprocessor or Microcontroller–Based Systems • Patented Silicon Shear Stress Strain Gauge • Available in Differential and Gauge Configurations • Also Available in Unibody Package (see MPX5010 Data Sheet)
Application Examples • Hospital Beds • HVAC • Respiratory Systems • Process Control
VS
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MPXL5010 SERIES
OPERATING OVERVIEW INTEGRATED
PRESSURE SENSOR 0 to 10 kPa (0 to 1.45 psi)
0.2 to 4.7 Volts Output
CASE 469–01, STYLE 1
CASE 472B–01, STYLE 1
X–ducer SENSING ELEMENT
THIN FILM TEMPERATURE COMPENSATION
AND GAIN STAGE #1
GAIN STAGE #2 AND
GROUND REFERENCE SHIFT CIRCUITRY
4 Vout
3 PINS 1 AND 5 THROUGH 8 ARE NO CONNECTS
CASE 472–01, STYLE 1
GND
Figure 1. Fully Integrated Pressure Sensor Schematic
MAXIMUM RATINGS(1)
Parametrics
Symbol
Value
Unit
Overpressure(2) (P1 > P2) Burst Pressure(2) (P1 > P2)
Pmax Pburst
75 kPa 100 kPa
Storage Temperature
Tstg
– 40° to +125°
°C
Operating Temperature
TA
– 40° to +125°
°C
1. TC = 25°C unless otherwise noted. 2. Exposure beyond the specified limits may cause permanent damage or degradation to the device.
PIN NUMBER
1 N/C 5
2 VS
6
3 Ground 7
4 Vout
8
N/C N/C N/C N/C
NOTE: Pins 1, 5, 6, 7 and 8 are internal device connections. Do not connect to external circuitry or ground.
Senseon and X–ducer are trademarks of Motorola, Inc. REV 2
© MMotootroolrao, lIanc.S1e9n97sor Device Data
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MPXL5010 SERIES
OPERATING CHARACTERISTICS (VS = 5.0 Vdc, TA = 25°C unless otherwise noted, P1 > P2)
Characteristic
Symbol
Min
Pressure Range(1) Supply Voltage(2)
POP VS
0 4.75
Supply Current
Minimum Pressure Offset(3) @ VS = 5.0 Volts
Full Scale Output(4) @ VS = 5.0 Volts
Full Scale Span(5) @ VS = 5.0 Volts
Accuracy(6)
(0 to 85°C) (0 to 85°C) (0 to 85°C) (0 to 85°C)
Io Voff VFSO VFSS —
— 0 4.475 — —
Sensitivity
V/P —
Response Time(7)
tR —
Output Source Current at Full Scale Output Warm–Up Time(8)
IO+ — ——
Offset Stability(9)
——
Decoupling circuit shown in Figure 3 required to meet Electrical Specifications.
Typ — 5.0 7.0 0.2
4.7
4.5
— 450 1.0 0.1 20 ± 0.5
Max 10 5.25 10 0.425
4.925
—
± 5.0 — — — — —
Unit kPa Vdc mAdc Vdc
Vdc
Vdc
%VFSS mV/kPa
ms mAdc mSec %VFSS
MECHANICAL CHARACTERISTICS Characteristic
Symbol
Min
Typ
Max Unit
Weight, Basic Element
— — 1.5 — Grams
NOTES:
1. 1.0 kPa (kiloPascal) equals 0.145 psi.
2. Device is ratiometric within this specified excitation range.
3. Offset (Voff) is defined as the output voltage at the minimum rated pressure. 4. Full Scale Output (VFSO) is defined as the output voltage at the maximum or full rated pressure. 5. Full Scale Span (VFSS) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the
minimum rated pressure.
6. Accuracy (error budget) consists of the following:
• Linearity:
Output deviation from a straight line relationship with pressure over the specified pressure range.
• Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is
cycled to and from the minimum or maximum operating temperature points, with zero differential pressure
applied.
• Pressure Hysteresis: Output deviation at any pressure within the specified range, when this pressure is cycled to and from the
minimum or maximum rated pressure, at 25°C.
• TcSpan:
Output deviation over the temperature range of 0° to 85°C, relative to 25°C.
• TcOffset:
Output deviation with minimum rated pressure applied, over the temperature range of 0° to 85°C, relative
to 25°C.
• Variation from Nominal: The variation from nominal values, for Offset or Full Scale Span, as a percent of VFSS, at 25°C. 7. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to
a specified step change in pressure.
8. Warm–up is defined as the time required for the product to meet the specified output voltage after the Pressure has been stabilized.
9. Offset stability is the product’s output deviation when subjected to 1000 hours of Pulsed Pressure, Temperature Cycling with Bias Test.
2 Motorola Sensor Device Data
MPXL5010 SERIES
ON–CHIP TEMPERATURE COMPENSATION, CALIBRATION AND SIGNAL CONDITIONING
.