Document
Freescale Semiconductor
Pressure
MPXHZ6117A Rev 0, 03/2010
Media Resistant Integrated Silicon Pressure Sensor for Measuring Absolute Pressure, On-Chip Signal Conditioned, Temperature Compensated and Calibrated
MPXHZ6117A Series
10 to 115 kPa (14.5 to 16.7 psi) 0.4 to 4.653 V Output
The MPXHZ6117A series pressure sensor integrates on-chip, bipolar op amp circuitry and thin film resistor networks to provide a high output signal and temperature compensation. The sensor’s packaging has been designed to provide resistance to high humidity conditions as well as common automotive media. The small form factor and high reliability of on-chip integration make this sensor a logical and economical choice for the system designer.
The MPXHZ6117A series piezoresistive transducer is a state-of-the-art, monolithic, signal conditioned, silicon pressure sensor. This sensor combines advanced micromachining techniques, thin film metallization, and bipolar semiconductor processing to provide an accurate, high level analog output signal that is proportional to applied pressure.
Features
• Resistant to High Humidity and Common Automotive Media • Improved Accuracy at High Temperature • 1.5% Maximum Error over 0°C to 85°C • Temperature Compensated from -40°C to +125°C • Durable Thermoplastic (PPS) Surface Mount Package (SSOP) with Optional Axial Port • Ideally Suited for Microprocessor or Microcontroller Based Systems
ORDERING INFORMATION
Device Name
Package Options
Case No.
# of Ports None Single Dual
Super Small Outline Package (Media Resistant Gel) (MPXHZ6117A Series)
Pressure Type Gauge Differential Absolute
MPXHZ6117A6U
Rail
1317
•
•
MPXHZ6117A6T1
Tape & Reel
1317
•
•
MPXHZ6117AC6U
Rail 1317A
•
•
MPXHZ6117AC6T1 Tape & Reel 1317A
•
•
Device Marking
MPXHZ6117A MPXHZ6117A MPXHZ6117A MPXHZ6117A
SUPER SMALL OUTLINE PACKAGE
MPXHX6117A6U/6T1 CASE 1317
MPXHX6117AC6U/6T1 CASE 1317A
© Freescale Semiconductor, Inc., 2010. All rights reserved.
Pressure
Operating Characteristics
Table 1. Operating Characteristics (VS = 5.0 VDC, TA = 25°C unless otherwise noted, Decoupling circuit shown in Figure 3 required to meet electrical specifications.)
Characteristic
Symbol
Min
Typ
Max Units
Pressure Range
POP
10
— 115 kPa
Supply Voltage(1)
VS 4.75 5.0 5.25 Vdc
Supply Current
IS — 6.0 10 mAdc
Minimum Pressure @ VS = 5.0 V
(0°C to 85°C)
VOFF
0.340
0.4
0.461
Vdc
Full Scale Output(2) @ VS = 5.0 V
(0°C to 85°C)
VFSO
4.592
4.653
4.714
Vdc
Full Scale Output(3)
(0°C to 85°C)
VFSS
— 4.253
—
V
Sensitivity
V/P — 40.5 — mV/kPa
Offset Stability(4)
(0°C to 85°C)
— -1.5 — 1.5 %VFSS
1. Device is ratiometric within this specified excitation range.
2. Offset (VOFF) is defined as the output voltage at the minimum rated pressure. 3. Full Scale Span (VFSS) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the
minimum related pressure.
4. Accuracy (error budget) is the deviation in actual output from nominal output over the entire pressure range and temperature range as a percent of VSS span at 25°C due to all sources of error including the following: Linearity: Output deviation from a straight line relationship with pressure over the specified pressure range. Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is cycled to and from the minimum or maximum operating temperature points, with zero differential pressure applied. Pressure Hysteresis: Output deviation at any pressure within the specified range, when this pressure is cycled to and from minimum or maximum rated pressure at 25°C. Offset Stability: Output deviation, after 1000 temperature cycles, -40° to 125°C, and 1.5 million pressure cycles, with minimum rated pressure applied. TcSpan: Output deviation over the temperature range of 0° to 85°C, relative to 25°C. TcOffset: Output deviation with minimum pressure applied, over the temperature range of 0° to 85°C, relative to 25°C.
MPXHZ6117A 2
Preliminary
Sensors Freescale Semiconductor
Maximum Ratings
Pressure
Table 2. Maximum Ratings(1)
Rating
Symbol
Value
Unit
Maximum Pressure (P1 > P2)
PMAX
400
kPa
Storage Temperature
TSTG
-40 to +125
°C
Operating Temperature
TA -40 to +125 °C
Output Source Current @ Full Scale Output(2)
IO+ +0.5 mAdc
Output Sink Current @ Minimum Pressure Offset
IO- -0.5 mAdc
1. Exposure beyond the specified limits may cause permanent damage or degradation to the device. 2. Maximum Output Current is controlled by effective impedance from VOUT to GND or VOUT to VS in the application circuit.
Figure 1 shows a block diagram of the internal circuitry integrated on a pressure sensor chip.
VS 2
Sensing Element
Thin Film Temperature Compensation
and Gain Stage #1
Gain Stage #2 and
Ground Reference Shift Circuitry
1 VOUT
3 Pins 1, 5, 6, 7, and 8 are NO CONNECTS
GND for super small outline package devices.
Figure 1. .