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MPXHZ6117A6U Dataheets PDF



Part Number MPXHZ6117A6U
Manufacturers Freescale Semiconductor
Logo Freescale Semiconductor
Description Media Resistant Integrated Silicon Pressure Sensor
Datasheet MPXHZ6117A6U DatasheetMPXHZ6117A6U Datasheet (PDF)

Freescale Semiconductor Pressure MPXHZ6117A Rev 0, 03/2010 Media Resistant Integrated Silicon Pressure Sensor for Measuring Absolute Pressure, On-Chip Signal Conditioned, Temperature Compensated and Calibrated MPXHZ6117A Series 10 to 115 kPa (14.5 to 16.7 psi) 0.4 to 4.653 V Output The MPXHZ6117A series pressure sensor integrates on-chip, bipolar op amp circuitry and thin film resistor networks to provide a high output signal and temperature compensation. The sensor’s packaging has been desi.

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Freescale Semiconductor Pressure MPXHZ6117A Rev 0, 03/2010 Media Resistant Integrated Silicon Pressure Sensor for Measuring Absolute Pressure, On-Chip Signal Conditioned, Temperature Compensated and Calibrated MPXHZ6117A Series 10 to 115 kPa (14.5 to 16.7 psi) 0.4 to 4.653 V Output The MPXHZ6117A series pressure sensor integrates on-chip, bipolar op amp circuitry and thin film resistor networks to provide a high output signal and temperature compensation. The sensor’s packaging has been designed to provide resistance to high humidity conditions as well as common automotive media. The small form factor and high reliability of on-chip integration make this sensor a logical and economical choice for the system designer. The MPXHZ6117A series piezoresistive transducer is a state-of-the-art, monolithic, signal conditioned, silicon pressure sensor. This sensor combines advanced micromachining techniques, thin film metallization, and bipolar semiconductor processing to provide an accurate, high level analog output signal that is proportional to applied pressure. Features • Resistant to High Humidity and Common Automotive Media • Improved Accuracy at High Temperature • 1.5% Maximum Error over 0°C to 85°C • Temperature Compensated from -40°C to +125°C • Durable Thermoplastic (PPS) Surface Mount Package (SSOP) with Optional Axial Port • Ideally Suited for Microprocessor or Microcontroller Based Systems ORDERING INFORMATION Device Name Package Options Case No. # of Ports None Single Dual Super Small Outline Package (Media Resistant Gel) (MPXHZ6117A Series) Pressure Type Gauge Differential Absolute MPXHZ6117A6U Rail 1317 • • MPXHZ6117A6T1 Tape & Reel 1317 • • MPXHZ6117AC6U Rail 1317A • • MPXHZ6117AC6T1 Tape & Reel 1317A • • Device Marking MPXHZ6117A MPXHZ6117A MPXHZ6117A MPXHZ6117A SUPER SMALL OUTLINE PACKAGE MPXHX6117A6U/6T1 CASE 1317 MPXHX6117AC6U/6T1 CASE 1317A © Freescale Semiconductor, Inc., 2010. All rights reserved. Pressure Operating Characteristics Table 1. Operating Characteristics (VS = 5.0 VDC, TA = 25°C unless otherwise noted, Decoupling circuit shown in Figure 3 required to meet electrical specifications.) Characteristic Symbol Min Typ Max Units Pressure Range POP 10 — 115 kPa Supply Voltage(1) VS 4.75 5.0 5.25 Vdc Supply Current IS — 6.0 10 mAdc Minimum Pressure @ VS = 5.0 V (0°C to 85°C) VOFF 0.340 0.4 0.461 Vdc Full Scale Output(2) @ VS = 5.0 V (0°C to 85°C) VFSO 4.592 4.653 4.714 Vdc Full Scale Output(3) (0°C to 85°C) VFSS — 4.253 — V Sensitivity V/P — 40.5 — mV/kPa Offset Stability(4) (0°C to 85°C) — -1.5 — 1.5 %VFSS 1. Device is ratiometric within this specified excitation range. 2. Offset (VOFF) is defined as the output voltage at the minimum rated pressure. 3. Full Scale Span (VFSS) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the minimum related pressure. 4. Accuracy (error budget) is the deviation in actual output from nominal output over the entire pressure range and temperature range as a percent of VSS span at 25°C due to all sources of error including the following: Linearity: Output deviation from a straight line relationship with pressure over the specified pressure range. Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is cycled to and from the minimum or maximum operating temperature points, with zero differential pressure applied. Pressure Hysteresis: Output deviation at any pressure within the specified range, when this pressure is cycled to and from minimum or maximum rated pressure at 25°C. Offset Stability: Output deviation, after 1000 temperature cycles, -40° to 125°C, and 1.5 million pressure cycles, with minimum rated pressure applied. TcSpan: Output deviation over the temperature range of 0° to 85°C, relative to 25°C. TcOffset: Output deviation with minimum pressure applied, over the temperature range of 0° to 85°C, relative to 25°C. MPXHZ6117A 2 Preliminary Sensors Freescale Semiconductor Maximum Ratings Pressure Table 2. Maximum Ratings(1) Rating Symbol Value Unit Maximum Pressure (P1 > P2) PMAX 400 kPa Storage Temperature TSTG -40 to +125 °C Operating Temperature TA -40 to +125 °C Output Source Current @ Full Scale Output(2) IO+ +0.5 mAdc Output Sink Current @ Minimum Pressure Offset IO- -0.5 mAdc 1. Exposure beyond the specified limits may cause permanent damage or degradation to the device. 2. Maximum Output Current is controlled by effective impedance from VOUT to GND or VOUT to VS in the application circuit. Figure 1 shows a block diagram of the internal circuitry integrated on a pressure sensor chip. VS 2 Sensing Element Thin Film Temperature Compensation and Gain Stage #1 Gain Stage #2 and Ground Reference Shift Circuitry 1 VOUT 3 Pins 1, 5, 6, 7, and 8 are NO CONNECTS GND for super small outline package devices. Figure 1. .


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