XLF/XLFV Series High Vacuum Angle Valve
Aluminum High Vacuum Angle Valve
Series XLA/XLAV
Dimensions
XLA/Air operated
E
(b)
C
D
øFn (KF flange)
(a)
E
Hea...
Description
Aluminum High Vacuum Angle Valve
Series XLA/XLAV
Dimensions
XLA/Air operated
E
(b)
C
D
øFn (KF flange)
(a)
E
Heater (Option) (c) Auto switch (Option)
øFd (K flange)
C
B
øG
A
(mm) Model
A
A
40 50 65 70 88 90
B
103 113 158 170 196 235
C
38 48 66 79 100 117
D
1 1 2 2 3 3
E Note 1)
— 12 11 11 11 11
Fn
30 40 55 75 87 114
Fd
— — — — 95 110
H G
17 26 41 52 70 83
H
40 39 63 68 69 96
XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80
Note 1) Dimension E applies when heater option is included. (Lead wire length: approx. 1 m) Note 2) (a), (b) and (c) in the above drawing indicate heater mounting positions. Moreover, heater mounting positions will differ depending on the type of heater. For further details, refer to mounting positions under “Replacement Heaters” on the back of page 9.
XLAV/With solenoid valve
J
Port P (Pressure port)
N
M
Port R (Exhaust port)
P
K
L
R
(mm) Model
(mm) Model
J
35.5 40.5 50.5
K
13.4 14.9 22.7
L
8.5 8.5 8.5
M
2.7 2.7 2.7
N
3 3 3
J
57 78.5 87
K
25.7 28.7 38.7
L
8.5 12 12
M
2.7 4 4
N
3 2 2
XLAV-16 XLAV-25 XLAV-40
XLAV-50 XLAV-63 XLAV-80
∗ Other dimensions are the same as the XLA. ∗ Other dimensions are the same as the XLA. Note) For further details on solenoid valves, refer to the SMC solenoid valve catalog “SYJ300/500/700” (ES11-86).
4
Free Datasheet http://www.datasheet4u.com/
Aluminum High Vacuum Angle Valve
Series XLC/XLCV
Dimensions
XLC/Air operated
E
(b)
C
D
øFn (KF flange)
(a)
E
(c)
Heater (Option) Auto s...
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