S9089

PHOTODIODE Si photodiode www.DataSheet4U.com S9089 Highly reliable quartz window photodiode for VUV detection S9089 is a VUV (vacuum ultraviolet) sensitive Si photodiode ideal for ArF (λ=193 nm) excimer laser detection. Compared to conventional types, S9089 offers improved sensitivity stability against VUV irradiation. The package is hermetically sealed by a newly developed quartz window that keeps it fully airtight and highly reliable. This package is also easier to handle than S8551 windowless type photodiode. Features Applications l Highly reliable quartz window l High reliable detection of ArF excimer laser (λ=193 nm) l Active area: 5.8 × 5.8 mm l TO-8 metal package l ArF (λ=193 nm), KrF (λ=248 nm) excimer laser l UV light detection, etc. measurement I Absolute maximum ratings (Ta=25 °C) Parameter Reverse voltage Operating temperature Storage temperature Symbol VR Max. Topr Tstg Value 5 -40 to +100 -55 to +125 Unit V °C °C I Electrical and optical characteristics (Ta=25 °C) Parameter Spectral response range Peak sensitivity wavelength Photo sensitivity Dark current Rise time Terminal capacitance Symbol l lp S ID tr Ct Condition l=193 nm l=800 nm VR=10 mV VR=0 V, RL=1 kW l=655 nm, 10 to 90 % VR=0 V, f=10 kHz Min. 0.04 0.4 - Typ. 190 to 1000 780 0.06 0.5 0.02 2 0.7 Max. 0.5 - Unit nm nm A/W A/W nA µs nF PRELIMINARY DATA Sep. 2002 1 Si photodiode I Spectral response www.DataSheet4U.com 0.6 (Typ. Ta=25 ˚C) S9089 0.5 PHOTO SENSIVITY (A/W) 0.4 0.3 0.2 ...