On-Chip Temperature Compensated and Calibrated Silicon Pressure Sensors
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Freescale Semiconductor Technical Data
MPMZ2202 Rev 1, 09/2006
200 kPa On-Chip Temperature Compen...
Description
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Freescale Semiconductor Technical Data
MPMZ2202 Rev 1, 09/2006
200 kPa On-Chip Temperature Compensated and Calibrated Silicon Pressure Sensors
The MPMZ2202 device is a silicon piezoresistive pressure sensor providing a highly accurate and linear voltage output directly proportional to the applied pressure. The sensor is a single, monolithic silicon diaphragm with the strain gauge and a thin-film resistor network integrated on-chip. The chip is laser trimmed for precise span and offset calibration and temperature compensation. Features Temperature Compensated Over 0°C to + 85°C Available in Easy-to-Use Tape and Reel Ratiometric to Supply Voltage Gauge Ported and Non Ported Options Increased media compatibility fluorocarbon gel
MPMZ2202 SERIES
COMPENSATED AND CALIBRATED PRESSURE SENSOR 0 TO 200 kPA (0 TO 29 psi) 40 mV FULL SCALE SPAN (TYPICAL)
MPAK PACKAGE
Typical Applications Pump/Motor Controllers Robotics Level Indicators Medical Diagnostics Pressure Switching Barometers Altimeters ORDERING INFORMATION
Device Type Ported Options Gauge, Axial Port Gauge, Axial Port Case No. MPX Series Order No. Packing Options Rails Device Marking MPMZ2202GS
MPMZ2202GS CASE 1320A-02
PIN NUMBER
1 2 GND +VOUT 3 4 VS -VOUT
1320A MPMZ2202GS 1320A MPMZ2202GST1
Tape & Reel MPMZ2202GS
© Freescale Semiconductor, Inc., 2006. All rights reserved.
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Figure 1 shows a block diagram of the internal circuitry on the stand-alone pres...
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