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MOTOROLA
SEMICONDUCTOR TECHNICAL DATA
Order this document by XMMAS500G/D
Preliminary Information
XMMAS500G10D XMMAS500G10S
MICROMACHINED ACCELEROMETER ± 500g AMPLIFIED
Micromachined Accelerometer
± 500g Amplified
The MMAS500G family of silicon capacitive, micro–machined accelerometers features integral signal amplification, signal conditioning, a 4–pole low–pass filter and temperature compensation. Zero–G offset, full scale span and filter roll–off are factory set and require no external passives. A calibrated self–test feature mechanically displaces the seismic mass with the application of a digital self–test signal. The device is offered in either of two plastic packages, thereby accommodating various axis orientation requirements. The MMAS500G incorporates a single polysilicon seismic mass, suspended between two fixed polysilicon plates (G–cell). The forces of acceleration move the seismic mass, thereby resulting in a change in capacitance. The G–cell is sealed at the die level, creating a particle–free environment. The G–cell features built–in damping and over–range stops to protect it from mechanical shock. MMAS500G accelerometers are ideally suited for automotive crash detection and recording, vibration monitoring, automotive suspension control, appliance control systems, etc. Features • Full Scale Measurement ± 500g • Calibrated, True Self–Test • Standard 16–Pin Plastic DIP • Integral Signal Conditioning and 4–Pole Filter • Linear Output • Robust, High Shock Survivability
1 2 3 4 5 6 7
DIP PACKAGE CASE 648C–03
SIP PACKAGE CASE 447–01
PIN NUMBER
N/C (1) N/C (1) N/C (1) Self–Test Output Bypass (2) GND VS (2) 9 10 11 12 13 14 15 16 N/C (1) N/C (1) N/C (1) N/C (1) N/C (1) N/C (1) N/C (1) N/C (1)
SIMPLIFIED BLOCK DIAGRAM
+ + 8 + VS
8
4
SELF–TEST
NOTES: 1. Internal connections. All N/C must remain floating, except DIP’s pin 11 which must be tied to pin 8. 2. Bypass to ground with 0.1 µF ceramic capacitor to improve noise performance.
g
G–CELL
A 6 BYPASS
LOW–PASS FILTER
TEMPERATURE COMPENSATION
5
OUTPUT
7
GND
This document contains information on a product under development. Motorola reserves the right to change or discontinue this product without notice.
Sensor ©Motorola Motorola, Inc. 1995 Device Data
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XMMAS500G10D XMMAS500G10S
MAXIMUM RATINGS
Rating Acceleration (biased each axis) Acceleration (unbiased each axis) Supply Voltage Storage Temperature Operating Temperature(6) Symbol G G VSmax Tstg TA Value ± 1000 ± 2000 – 0.3 to +7.0 – 40 to +125 – 40 to +85 Unit g g Vdc °C °C
OPERATING CHARACTERISTICS (VS = 5.0 Vdc, TA = 25°C unless otherwise noted)
Characteristic Acceleration Range Output Drive Capability Supply Voltage Supply Current Full Scale Output Range Sensitivity (over temperature range) (1) (2) (3) Zero Acceleration Output (TA = 25°C) (4) Zero Acceleration Output (over temperature range) (3) (4) Linearity Transverse Sensitivity Frequency Bandwidth Noise Self–Test Output Equivalent (5) Self–Test Triggering Voltage Self–Test Input Current Symbol G — VS IO VFSO ∆V/∆G Voff Voff — — — — GS VTH — Min ± 500 – 0.2 4.75 — 0.3 2.9 2.3 2.1 — — — — 44 1.6 — Typ — — 5.0 5.0 — 3.2 2.5 2.5 0.5 1.0 700 20 50 — 10 Max — 0.2 5.25 — 4.7 3.6 2.7 2.9 — 3.0 — 50 56 3.4 — Unit g mA V mA V mV/g V V %FSO %FSO Hz mVpk g V µA
NOTES: 1. The output voltage increases from the Zero Acceleration Output for positive acceleration and decreases for negative acceleration. The typical sensitivity is 3.2 mV/g. For example, with VS = 5.0 V, a +250g input will result in a 3.3 V output. (Voutput = 2.5 + 0.0032 x 250) and a – 250g input will result in a 1.7 V output. 2. Sensitivity is a ratiometric parameter: ∆V/∆G(Vs) = ∆V/∆G(5 V) x (VS / 5 V). 3. The compensated temperature range is – 40 to +85°C. 4. Zero Acceleration Output is a ratiometric parameter: Voff(Vs) = Voff(5 V) x (VS / 5 V). 5. Equivalent output in response to a Logic Level One on the self–test pin. 6. Additional temperature range available. Consult factory.
ORDERING INFORMATION
Device XMMAS500G10D XMMAS500G10S Temperature Range –40 to +85°C –40 to +85°C Case No. Case 648C–03 Case 447–01 Package Plastic DIP Plastic SIP
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Motorola Sensor Device Data
XMMAS500G10D XMMAS500G10S
POSITIVE ACCELERATION SENSING DIRECTION
16
9
1
8
1
8
*
DIP PACKAGE SIP PACKAGE
* When positioned as shown, gravity will result in a positive 1g output
SIP PACKAGE DRILLING PATTERN
.499
.350
.250
.050 .000 .050 .150
.250
.350
.499
.240 7 x ∅ .040 + .004 – .000 .000 + .004 2 x ∅ .096 – .000 + .005 2 x ∅ .058 – .000
.240
Motorola reserves the right to make changes without further notice to any products herein. Motorola makes no warranty, representation or guarantee regarding the suitability of its products for any particular purpose, nor does Motorola assume any liability arising out of the application or use of any product or circuit, and specifically disclaims any and all liability, including without limitation consequential or incidental damages. “Typica.