MiCS-2614

MiCS-2614 Data Sheet 1087 rev 4 The MiCS-2614 is a compact MOS sensor. The MiCS-2614 is a robust MEMS sensor for ozone detection; suitable also for gas leak detection and outdoor air quality monitoring. Features Smallest footprint for compact designs (5 x 7 x 1.55 mm) Robust MEMS sensor for harsh environments High-volume manufacturing for low-cost applications Short lead-times Detectable gases Ozone O3 10 – 1000ppb RS / R 100ppb 10 1 0.1 0.01 10 100 O3 [ppb] Continuous power ON, 25°C, 50% RH 1000 For more information please contact: [email protected] SGX Sensortech, Courtils 1 CH-2035 Corcelles-Cormondrèche Switzerland www.sgxsensortech.com Page 1 of 5 MiCS-2614 Data Sheet 1087 rev 4 Performance sensor Characteristic RED sensor Symbol Typ Min Max Unit Sensing resistance in air (see note 1) Typical NH3 detection range R0 FS 11 3 60 k 10 1000 ppb Sensitivity factor (see note 2) SR 2 1.5 4 - Notes: 1. Sensing resistan...