MPVZ5004

Freescale Semiconductor Data Sheet: Technical Data Document Number: MPxx5004 Rev. 12.1, 05/2015 MPxx5004, 0 to 3.92 kPa, Differential and Gauge, Integrated Pressure Sensor Freescale’s MPxx5004 series piezoresistive transducer is a state-of-the-art monolithic silicon pressure sensor designed for a wide range of applications, but particularly those employing a microcontroller or microprocessor with A/D inputs. This sensor combines a highly sensitive implanted strain gauge with advanced micromachining techniques, thin-film metallization, and bipolar processing to provide an accurate, high level analog output signal that is proportional to the applied pressure. Features 1.5% maximum error for 0 to 100 mm H2O over +10 °C to +60 °C with autozero 2.5% maximum error for 100 to 400 mm H2O over +10 °C to +60 °C with autozero 6.25% maximum error for 0 to 400 mm H2O over 10 °C to +60 °C without autozero Temperature compensated over 10 °C to 60 °C Available in gauge ...