On-Chip Temperature Compensated & Calibrated Pressure Sensors
MOTOROLA
SEMICONDUCTOR TECHNICAL DATA
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2OCP0rone0m-sCksphPueiranpesTaSetemendpseo&rras...
Description
MOTOROLA
SEMICONDUCTOR TECHNICAL DATA
Order this document by MPX2200/D
2OCP0rone0m-sCksphPueiranpesTaSetemendpseo&rrasCtaulriebrated
The MPX2200 and MPX2201 series device is a silicon piezoresistive pressure sensor providing a highly accurate and linear voltage output — directly proportional to the applied pressure. The sensor is a single monolithic silicon diaphragm with the strain gauge and a thin–film resistor network integrated on–chip. The chip is laser trimmed for precise span and offset calibration and temperature compensation. They are designed for use in applications such as pump/motor controllers, robotics, level indicators, medical diagnostics, pressure switching, barometers, altimeters, etc.
Features
Temperature Compensated Over 0°C to + 85°C Patented Silicon Shear Stress Strain Gauge ± 0.25% Linearity (MPX2200D) Easy to Use Chip Carrier Package Available in Absolute, Differential and Gauge Configurations
Application Examples
Pump/Motor Controllers Robotics Level Indicators Medical Diagnostics Pressure Switching Barometers Altimeters
Figure 1 illustrates a block diagram of the internal circuitry on the stand–alone pressure sensor chip.
VS 3
X–ducer SENSING ELEMENT
THIN FILM TEMPERATURE COMPENSATION
AND CALIBRATION CIRCUITRY
2 Vout+
4 Vout–
1
GND
Figure 1. Temperature Compensated Pressure Sensor Schematic
VOLTAGE OUTPUT versus APPLIED DIFFERENTIAL PRESSURE The differential voltage output of the X–ducer is directly proportional to the d...
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