FM362 Datasheet

FM362 Mass Flow Controllers and Flowmeters

Tylan FC260/FM360 Mass Flow Controllers and Flowmeters Low cost mass flow controllers with long-term repeatability and performance ® Process Values Designed to meet the exacting requirements of semiconductor processes and equipment, the Tylan FC260 and Tylan FM360 models are premium quality elasto.

Features

Attitude Insensitive Flow Sensor Product Benefits Eliminates air convection currents inside its case without sacrificing response speed. Can be mounted in any position without requiring zero adjustment. Superior Bypass Design to Operate under Laminar Flow Conditions Solid State Valve Assembly Constructed of Type 316 Stainless Steel Laminar Flow Assures accuracy over the entire range of mass flow controller. Easily removed for range changes. Completely compatible with reactive and corrosive materials. Design eliminates internal dead volumes. Eliminates the need for complex, interactive multi.