Silicon Pressure Sensor
MOTOROLA
SEMICONDUCTOR TECHNICAL DATA
Order this document by MPXT2010/D
Silicon Pressure Sensor On-Chip Temperature Co...
Description
MOTOROLA
SEMICONDUCTOR TECHNICAL DATA
Order this document by MPXT2010/D
Silicon Pressure Sensor On-Chip Temperature Compensated and Calibrated
The MPXT2010 Series silicon piezoresistive pressure sensors provide a very accurate and linear voltage output — directly proportional to the applied pressure. These sensors house a single monolithic silicon die with the strain gauge and thin–film resistor network integrated on each chip. The sensor is laser trimmed for precise span and offset, both calibrated and temperature compensated.
Features Stress Isolated Top Piston Fit Package Gauge Pressure Measurement Temperature Compensated over 0° to + 85°C Unique Silicon Shear Stress Strain Gauge Ratiometric to Supply Voltage Available in Unibody Package (Case 344), See MPX2010 Series Data Sheet
Application Examples Respiratory Diagnostic Devices and Systems Air Movement Control (HVAC) Level Indicators Controllers Pressure Switching
VS 3
X–ducer SENSING ELEMENT
THIN FILM TEMPERATURE COMPENSATION
AND CALIBRATION CIRCUITRY
2 Vout+ 4 Vout–
1
GND
Figure 1. Calibrated and Temperature Compensated Pressure Sensor Schematic
MPXT2010 SERIES
COMPENSATED PRESSURE SENSOR 0 to 10 kPa (0 to 1.45 psi) FULL SCALE SPAN: 25 mV
BASIC ELEMENT CASE 473A–01
PIN NUMBER 1 Gnd 5 N/C 2 +Vout 6 N/C 3 VS 7 N/C 4 –Vout 8 N/C NOTE: Pins 5, 6, 7, and 8 are not device connections. Do not connect to external circuitry or ground. Pin 1 is noted by the notch in the Lead.
Senseon and X–ducer ar...
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