D6F-03A3-000

MEMS Mass Flow Sensor D6F-03A3-000 Compact, sensors featuring MEMS technology for precision mass airflow measurement Precision unidirectional mass airflow up to 3 LPM Stable output across full scale Ultra-compact size 36.6 (L) x 8 (W) x 16.8 (H) mm Low power consumption Application Examples Pick and place systems Industrial processes Leak detection Spectroscopy Mass flow controllers Scientific / test equipment Environmental comfort controls Fuel cell controls Ordering Information Model D6F-03A3-000 D6F-Cable2 Case Thermoplastic resin / Aluminum alloy *Dry gas must not contain large particles, e.g., dust, oil, mist. ■ Rating Absolute maximum rating Item Power-supply voltage Output voltage VCC VOUT Term Applicable Gas Air* Flow Range 0 – 3 LPM Ratings 26.4 6 VDC VDC Unit MEMS Mass Flow Sensor D6F-03A3-000 1 ■ Electrical Performance Recommended operation condition and DC characteristic Item Power-supply voltage Operating temperature Maximum output voltage Minimum output voltage VCC TOPR VOH VOL Term Condition — — Load resistance 10kΩ Load resistance 10kΩ MIN 10.8 0 5 0 TYP — — — — MAX 26.4 50 5.7 1 Unit VDC °C VDC VDC ■ Basic Performance 0 to 3L/min. (Normal) volumetric flow rate at 0° C, 101.3kPa. Measurement condition: Power-supply voltage 12 ±0.1VDC, ambient temperature 25 ±5° C and ambient air humidity 25 to 75% RH. D6F-03A3-000 Flow Rate L/min (normal) Output Voltage (VDC) 0 1.00 ±0.2 0.6 2.83 ±0.2 1.2 3.77 ±0.2 1.8 4....