Aluminum High Vacuum Angle Valve
Series XLA/XLAV
Dimensions
XLA/Air operated
E
(b)
C
D
øFn (KF flange)
(a)
E
Heater (Option) (c) Auto switch (Option)
øFd (K flange)
C
B
øG
A
(mm) Model
A
A
40 50 65 70 88 90
B
103 113 158 170 196 235
C
38 48 66 79 100 117
D
1 1 2 2 3 3
E Note 1)
— 12 11 11 11 11
Fn
30 40 55 75 87 114
Fd
— — — — 95 110
H ...
