TQP15
0.15 um D-mode pHEMT Foundry Service Process Cross Section Diagram
Updated Process Diagram
Passivation Nitride
Features
D-Mode, -1.0 V Vp InGaAs Active Layer pHEMT Process 0.15 µm Low Cost Optical Lithography Gates High Density Interconnects: 1 Global 1 Local High-Q Passives Thin Film Resistors High Value Capacitors (620 pF/mm2 Bac...
