Production Process
TQPHT
0.5 um pHEMT Foundry Service
Features
Metal 2 Dielectric Metal 1 Dielectric
MIM Metal
Metal 2 - 4um Dielectric Metal 1 - 2um
Metal 1
NiCr Isolation Implant Isolation Implant
Nitride N+ Pseudomorphic Channel
Metal 0
pHEMT
MIM Capacitor Semi-Insulating GaAs Substrate
NiCr Resistor
0.5 um pHEMT Device C...