GG1178

MEMS Rotational Rate Sensors GG1178 - Digital or Analog Output Honeywell’s GG1178 family of rotation sensors are highperformance silicon micromachined angular rate sensors for multiple applications. They provide a low noise output signal with excellent performance over a large temperature range and in high vibration environments. Advanced Information A GG1178 rate sensor utilizes a MEMS, Micro Electro Mechanical System, sense element and a CMOS ASIC in a ceramic 14-pin LCC package. The sensing element is fabricated from bulk silicon using proprietary deep reactive ion etching (DRIE) processes. It makes use of the physical properties of the Coriolis Effect and a capacitive sensing mechanism. The sensing element utilizes differential capacitance and device symmetry to significantly reduce errors from acceleration and off-axis rotations. Rotating the sensor shifts an oscillating silicon structure, measurably changing the differential capacitance. The ASIC detects and transforms changes in capacitance into an analog or digital output proportional to angular rate. The device sensitivity (scale factor) is factory programmable from ±75º/sec to ±300º/sec. Output bandwidth is also factory programmable between 30 and 125 Hz. Features Broad Dynamic Range Low Noise, High Resolution Excellent Temperature Performance Compact 14-pin LCC SMT Package Factory-Defined Low-Pass Filter Low Sensitivity to Vibration Wide Temperature Range Robust to Vibration and Shock Advanced M...