SILICON PRESSURE SENSORS
MOTOROLA
Freescale Semiconductor, Inc.
SEMICONDUCTOR TECHNICAL DATA
Order this document by MPX2010/D
10 kPa On-Chip ...
Description
MOTOROLA
Freescale Semiconductor, Inc.
SEMICONDUCTOR TECHNICAL DATA
Order this document by MPX2010/D
10 kPa On-Chip Temperature Compensated & Calibrated Silicon Pressure Sensors
The MPX2010/MPXV2010G series silicon piezoresistive pressure sensors provide a very ac c ur at e and l i n e a r v o l ta g e o u tp u t — d i r ec tl y proportional to the applied pressure. These sensors house a single monolithic silicon die with the strain gauge and thin–film resistor network integrated on each chip. The sensor is laser trimmed for precise span, offset calibration and temperature compensation.
UNIBODY PACKAGE
MPX2010 MPXV2010G SERIES
Motorola Preferred Device
MPX2010D CASE 344
COMPENSATED PRESSURE SENSOR 0 to 10 kPa (0 to 1.45 psi) FULL SCALE SPAN: 25 mV
Freescale Semiconductor, Inc...
Features Temperature Compensated over 0°C to +85°C Ratiometric to Supply Voltage Differential and Gauge Options Application Examples Respiratory Diagnostics Air Movement Control Controllers Pressure Switching Figure 1 shows a block diagram of the internal circuitry on the stand–alone pressure sensor chip.
VS 3 THIN FILM TEMPERATURE COMPENSATION AND CALIBRATION CIRCUITRY 1 GND
SMALL OUTLINE PACKAGE SURFACE MOUNT
MPX2010GP CASE 344B
MPXV2010GP CASE 1369
2 4
SENSING ELEMENT
Vout+ Vout-
MPX2010DP CASE 344C
MPXV2010DP CASE 1351
PIN NUMBER
1 2 MPX2010GS CASE 344E 3 4 Gnd +Vout VS –Vout 5 6 7 8 N/C N/C N/C N/C
Figure 1. Temperature Compensated and Calibrated Pressure Sensor S...
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