MPX5010

MOTOROLA SEMICONDUCTOR TECHNICAL DATA Order this document by MPX5010/D MPX5010 Integrated Silicon Pressure Sensor On-Chip Signal Conditioned, Temperature Compensated and Calibrated The MPX5010 series piezoresistive transducer is a state–of–the–art monolithic silicon pressure sensor designed for a wide range of applications, but particularly those employing a microcontroller or microprocessor with A/D inputs. This patented, single element transducer combines advanced micromachining techniques, thin–film metallization, and bipolar processing to provide an accurate, high level analog output signal that is proportional to the applied pressure. Features 5.0% Maximum Error over 0° to 85°C Ideally Suited for Microprocessor or Microcontroller–Based Systems Patented Silicon Shear Stress Strain Gauge Durable Epoxy Unibody Element Temperature Compensated over BASIC CHIP CARRIER ELEMENT CASE 867–08, STYLE 1 SERIES INTEGRATED PRESSURE SENSOR 0 to 10 kPa (0 to 1.45 psi) 0.2 to 4.7 V OUTPUT *40° to +125°C VS 3 X–ducer SENSING ELEMENT THIN FILM TEMPERATURE COMPENSATION AND GAIN STAGE #1 2 GND GAIN STAGE #2 AND GROUND REFERENCE SHIFT CIRCUITRY 1 Vout DIFFERENTIAL PORT OPTION CASE 867C–05, STYLE 1 PINS 4, 5 AND 6 ARE NO CONNECTS PIN NUMBER 1 2 3 Vout Gnd VS 4 5 6 N/C N/C N/C Figure 1. Fully Integrated Pressure Sensor Schematic MAXIMUM RATINGS(1) Parametrics Overpressure(2) (P1 > P2) Burst Pressure(2) (P1 > P2) Storage Temperature Operating Temperature Symbol Pmax Pbur...