MS7212

MS7212 PRESSURE SENSOR DIE (0-12 BAR) FOR HARSH ENVIRONMENT 0 to 1200 kPa range (12 bar or 174 PSI) Absolute pressure sensors Hermetic sensor RoHS-compatible & Pb-free1 DESCRIPTION The MS7212 is an absolute silicon micro-machined pressure sensor for harsh environment. A vacuum reference cavity is sealed on top of the sensitive silicon membrane by the anodic bonding of a Pyrex™ cap. The pressure, applied on the backside, is converted in electrical signal by piezo-resistors implanted in the silicon membrane. To improve the sensor stability, a drilled Pyrex™ is bonded on the backside. As the pressure port consists of Pyrex™ and silicon, both stable in most of the chemicals, the MS7212 is suitable for media-resistive applications. FEATURES Media resistive pressure sensor die Output Span 150mV @ 5 V Temperature Range -40°…+125°C Linearity 0.05% (typical) Die Size 1.63 x 1.95 mm2 Low Cost, High reliability APPLICATION Harsh envir...