Media Resistant and High Temperature Accuracy Integrated Silicon Pressure Sensor
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MOTOROLA
Freescale Semiconductor, Inc.
Order Number: MPXAZ6115A Rev. 1, 06/2004
SEMICONDUCTOR TEC...
Description
www.DataSheet4U.com
MOTOROLA
Freescale Semiconductor, Inc.
Order Number: MPXAZ6115A Rev. 1, 06/2004
SEMICONDUCTOR TECHNICAL DATA
Media Resistant and High Temperature Accuracy Integrated Silicon Pressure Sensor for Measuring Absolute Pressure, On-Chip Signal Conditioned, Temperature Compensated and Calibrated
MPXAZ6115A MPXHZ6115A SERIES
INTEGRATED PRESSURE SENSOR 15 to 115 kPa (2.2 to 16.7 psi) 0.2 to 4.8 Volts Output SMALL OUTLINE PACKAGE
Freescale Semiconductor, Inc...
Motorola's MPXAZ6115A series sensor integrates on-chip, bipolar op amp circuitry and thin film resistor networks to provide a high output signal and temperature compensation. The sensor's packaging has been designed to provide resistance to high humidity conditions as well as common automotive media. The small form factor and high reliability of on-chip integration make the Motorola pressure sensor a logical and economical choice for the system designer. The MPXAZ6115A series piezoresistive transducer is a state-of-the-art, monolithic, signal conditioned, silicon pressure sensor. This sensor combines advanced micromachining techniques, thin film metallization, and bipolar semiconductor processing to provide an accurate, high level analog output signal that is proportional to applied pressure. Figure 1 shows a block diagram of the internal circuitry integrated on a pressure sensor chip. Features Resistant to High Humidity and Common Automotive Media Improved Accuracy at High Temperature 1.5% Maxim...
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