ɀ State-of-the-art silicon micromachining ɀ Sensitive to low flows – 0.1 sccm to 20 SLPM ɀ Adaptable for use with higher flows (See Application Note 2 page 128.) ɀ Fast response time ɀ Analog output ɀ Low power consumption OPERATION The microbridge m...
AWM4000 PDF File
