Airflow Sensors Microbridge Mass Airflow/Amplified
Figure 1 Heater control circuit
FEATURES ɀ Laser trimmed for improve...
Airflow Sensors Microbridge Mass Airflow/Amplified
Figure 1 Heater control circuit
FEATURES ɀ Laser trimmed for improved sensor
interchangeability ɀ Flow sensing up to 1.0 SLPM ɀ Low differential pressure sensing
Like the AWM2000 Series, the dual Wheatstone bridges control airflow measurement. The AWM3000 Series is amplified; therefore, it can be used to increase the gain and to introduce
voltage offsets to the sensor output. The schematic in Figure 3 depicts the amplification circuitry on board the sensor. Also, the heater control circuit (see Figure 1) and the sensing bridge supply circuit (see Figure 2) are on board the package.
Figure 2 Sensing bridge supply circuit
AWM3000 Series
Figure 3 Differential instrumentation amplifier circuit
Airflow
Honeywell ɀ Sensing and Control ɀ 1-800-537-6945 USA ɀ ⍣1-815-235-6847 International ɀ 1-800-737-3360 Canada
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Airflow Sensors Microbridge Mass Airflow/Amplified
AWM3000 Series
AWM3000 SERIES ORDER GUIDE (Performance Characteristics @ 10.01 ±0.01 VDC, 25°C)
Catalog Listings
AWM3100V
AWM3150V
AWM3200V
AWM3300V
Flow Range (Full Scale)
+200 sccm
+30 sccm
+1000 sccm
Pressure Range (See Application Note 1)
Output
Voltage @ Trim Point
Null
Voltage
5 VDC @ 200 sccm 1.00 ±0.05 VDC
3.4 VDC @ 25 sccm 1.00 ±0.10 VDC
+2.0⍯ H2O (5 mBar) 5 VDC @ 2⍯ H2O 1.00 ±0.08 VDC
5 VDC @ 1000 sccm 1.00 ±0.10 VDC
Null
Voltage Shift, Typ. +25° to −25°C, 25° to +85°C
±25 mV
±100 mV
±25 mV
±25 mV
Output
Voltage Shift, Max. +25° to ...