Integrated Silicon Pressure Sensor - Freescale Semiconductor
Description
Freescale Semiconductor Technical Data
Integrated Silicon Pressure Sensor On-Chip Signal Conditioned, Temperature Compensated, and Calibrated
The MPX5100 series piezoresistive transducer is a state-of-the-art monolithic silicon pressure sensor designed for a wide range of applications, but particularly those employing a microcontroller or microprocessor with A/D inputs.
This patented, single element transducer combines advanced micromachining techniques, thin-film metallization, and bipolar processing to provide an accurate, high level analog output signal that is proportional to the applied pressure.
Features
• 2.
5% Maximum Error over 0° to 85°C • Ideally suited for Microprocessor or Microcontroller-Based Systems • Patented Silicon Shear Stress Strain Gauge • Available in Absolute, Differential and Gauge Configurations • Durable Epoxy Unibody Element • Easy-to-Use Chip Carrier Option
Typical Applications
• Patient Monitoring • Process Control • Pump/Motor Control • Pressure wSitching
ORDERING INFORMATION
Device Type
Options
Case No.
MPX Series Order Number
Device Marking
UNIBODY PACKAGE (MPX5100 SERIES)
Basic
Absolute
Elements Differential
867 867
Ported Differential Dual Ports Elements Absolute, Single Port
867C 867B
Gauge, Single Port
867B
MPX5100A MPX5100D MPX5100DP MPX5100AP MPX5100GP
MPX5100A MPX5100D MPX5100DP MPX5100AP MPX5100GP
Gauge, Axial PC Mount Gauge, Axial Port, SMT Gauge, Axial Port, DIP
867F 482A 482C
MPX5100GSX MPXV5100GC6U MPX5V100GC7U
MPX5100D MPXV5100G MPXV5100G
Gauge, Dual Port, SMT 1351 MPXV5100DP
MPXV5100
UNIBODY PACKAGES
MPX5100 Rev 10, 05/2005
MPX5100/MPXV5100 SERIES
INTEGRATED PRESSURE SENSOR 0 to 100 kpa (0 to 14.
5 psi) 15 to 115 kPa (2.
2 to 16.
7 psi) 0.
2 to 4.
7 V Output
SMALL OUTLINE PACKAGES
MPXV5100GC6U CASE 482A-01
MPXV5100GC7U CASE 482C-03
MPXV5100DP CASE 1351-01
PIN NUMBER(1)
1 N/C 5 N/C
2 VS 6 N/C
3 GND 7
N/C
4 VOUT 8
N/C
1.
Pins 1, 5, 6, 7, and 8 are internal device connections.
Do not connect...
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