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TQP15

Part Number	TQP15
Manufacturer	TriQuint Semiconductor
Description	0.15 um D-mode pHEMT Foundry Service
Published	Nov 2, 2010
Detailed Description	TQP15 0.15 um D-mode pHEMT Foundry Service Process Cross Section Diagram Updated Process Diagram Passivation Nitride Fe...
Datasheet	TQP15 PDF File

Overview

TQP15 0.
15 um D-mode pHEMT Foundry Service Process Cross Section Diagram Updated Process Diagram Passivation Nitride Features • D-Mode, -1.
0 V Vp • InGaAs Active Layer pHEMT Process • 0.
15 µm Low Cost Optical Lithography Gates • High Density Interconnects: • 1 Global • 1 Local • High-Q Passives • Thin Film Resistors • High Value Capacitors (620 pF/mm2 • Backside Vias Optional • Based on Production TQP13 Processes Global Plated Metal 2 (4 um) MIM Capacitor NiCr or HVR Resistor K55 Bell Metal Bell Metal (<1 um) CTOP K55 Bell Metal-Local Interconnect (<1 um) BCB Ohmic WRCS N+ Pseudomorphic channel Damage Isolation Implant Process Description TriQuint’s TQP15 process is based on our produc...

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