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MS7212-A2

Measurement
Part Number MS7212-A2
Manufacturer Measurement
Description Hermetic Pressure Sensor Die
Published Apr 26, 2017
Detailed Description PRELIMINARY MS7212-A2 Hermetic Pressure Sensor Die (0-12 bar) • 0 to 1200 kPa range (12 bar or 174 PSI) • Absolute pres...
Datasheet PDF File MS7212-A2 PDF File

MS7212-A2
MS7212-A2

Overview
PRELIMINARY MS7212-A2 Hermetic Pressure Sensor Die (0-12 bar) • 0 to 1200 kPa range (12 bar or 174 PSI) • Absolute pressure sensor • Hermetic sensor, temperature up to 150°C • Pads on one side • For harsh environment • RoHS-compatible & Pb-free1 DESCRIPTION The MS7212-A2 is an absolute silicon micro-machined pressure sensor for harsh environment, with the pads on one side.
A vacuum reference cavity is sealed on top of the sensitive silicon membrane by the anodic bonding of a glass cap.
The pressure, applied on the backside, is converted in electrical signal by piezo-resistors implanted in the silicon membrane.
To improve the sensor stability, a drilled glass is bonded on the backside.
As t...


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